The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2001
Filed:
Oct. 06, 1998
Ken Murayama, Tsuchiura, JP;
Takashi Shirai, Tsukuba, JP;
Takafumi Morimoto, Kashiwa, JP;
Hiroshi Kuroda, Tsuchiura, JP;
Harumasa Onozato, Ohme, JP;
Tsuyoshi Nishigaki, Tsuchiura, JP;
Hitachi Construction Machinery Co, Ltd., Tokyo, JP;
Abstract
A scanning probe microscope is provided with a probe tip directed to a sample surface, an XYZ fine movement mechanism for providing a relative positional change between the sample and the probe tip, and a displacement detecting section for detecting the displacement of the probe tip. The scanning probe microscope measures the surface characteristic of the sample by using a control signal. This control signal is generated on a signal outputted from the displacement detecting section and is used for keeping a state of a mutual action generated between the sample and the probe tip identical to a predetermined state, while the probe tip scans the surface of the sample based on the operation of the XYZ fine movement mechanism. Further, it comprises a moving section arranged on a standard surface of a microscope stage, which has the sample on an upper surface and moves along the standard surface based on a static pressure guide, a height-position control section for selectively supplying high-pressure fluid to the moving section so as to carry out the static pressure guide and controlling the height-position of the moving section to the standard surface, and an actuating mechanism for moving the moving section in directions parallel to the standard surface.