The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2001
Filed:
Nov. 28, 2000
Applicant:
Inventor:
Toshihisa Tomie, Tsukuba, JP;
Assignee:
Agency of Industrial Science and Technology, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 ;
U.S. Cl.
CPC ...
H05G 2/00 ;
Abstract
A solid target (,) is formed with a cavity (,). The inner wall of the solid target at the cavity is ablated by ablation pulsed laser beams (,). The solid target is left standing until a highly densified portion (,) of a vaporized substance (,) is formed in the space within the cavity (,), and the highly densified portion (,) is then irradiated with heating pulsed laser beams (,), thereby forming high-temperature plasma (,) for generating radiation rays (,). As a result, good-quality radiation rays accompanied by a minimal amount of debris can be generated.