The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2001
Filed:
Sep. 21, 1999
Applicant:
Inventors:
Kulbir Singh Bhalla, Red Bank, NJ (US);
Albert Maxwell Gottlieb, Maplewood, NJ (US);
Assignee:
Lucent Technologies Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 2/608 ;
U.S. Cl.
CPC ...
G02B 2/608 ;
Abstract
A microelectromechanical system in which, operationally independent of the movable element and the component for moving it, a microelectromechanical sensor senses the position of the movable element. The microelectromechanical sensor adjoins the movable element, at least in part, and may be a strain gage, or a gage of a capacitive, piezoelectric, piezoresistive, or pressure type, among others. The resulting signal is fed back to control the component for moving the movable element. In an array of movable elements and sensors, the signal of each sensor is specific to one movable element.