The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2001
Filed:
Mar. 10, 1999
Chau C. Tran, Malden, MA (US);
John A. Geen, Tewskbury, MA (US);
A. Paul Brokaw, Burlington, MA (US);
Geoffrey T. Haigh, Boxford, MA (US);
Analog Devices Inc., Norwood, MA (US);
Abstract
A semiconductor magnetic field sensor including a substrate; a semiconductor moveable element suspended above the substrate, the moveable element being configured to have a current passed therethrough and to deflect perpendicularly with respect to an applied magnetic field; and at least one fixed semiconductor element arranged adjacent to the moveable element, the moveable element being deflected to or away from the fixed element in response to an applied magnetic field. In an alternative embodiment of the invention, there is provided a semiconductor magnetic field sensor including a substrate; first and second semiconductor moveable beams suspended above the surface of the substrate, the first and second beams being configured to have equal and opposite currents passed therethrough and to deflect perpendicularly with respect to an applied magnetic field; and at least one first and second fixed semiconductor elements arranged adjacent to the first and second beams, respectively, the first and second beams being deflected to or away from the respective first and second fixed elements in response to an applied magnetic field.