The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2001

Filed:

Dec. 21, 1998
Applicant:
Inventors:

Tetsuya Iwata, Nagaoka, JP;

Makoto Hirokawa, Nagaoka, JP;

Assignee:

System Seiko Co., Ltd., Niigata, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/34 ; G01B 7/287 ; G01B 2/130 ; G01N 2/772 ;
U.S. Cl.
CPC ...
G01B 7/34 ; G01B 7/287 ; G01B 2/130 ; G01N 2/772 ;
Abstract

A flatness measuring apparatus is adapted to measure the flatness of the surface of a plate-shaped object such as a disk in a non-contact fashion. A disk is removably held by a measuring table, with the projection of the measuring table engagedly received in a central through hole of the disk. A plurality of eddy current undulation sensors are arranged in a sensor head that is arranged so as to be able to linearly move back and forth along the measuring table. Said eddy current undulation sensors generate an eddy current in said disk and detect any undulation on the surface of said disk. A flatness map is produced for the surface of the disk based on a signal representing the position of the sensor head and on signals from the eddy current undulation sensors, and then is output to a display and/or a printer.


Find Patent Forward Citations

Iwata, Tetsuya. (2001). Surface flatness measuring apparatus (U.S. Patent No. 6275032). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6275032

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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