The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2001

Filed:

Apr. 22, 1999
Applicant:
Inventors:

Claus Zumstrull, Regensburg, DE;

Wilhelm Frank, Bamberg, DE;

Andreas Voigt, Regensburg, DE;

Carsten Schuh, Baldham, DE;

Günter Lewentz, Regensburg, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/108 ;
U.S. Cl.
CPC ...
H01L 4/108 ;
Abstract

A servo drive includes a piezoelectric actuator contained in a drive housing. The actuator has an actuator stack surrounded by a hollow cylindrical spring element and an actuator casing disposed in the spring element. The spring element is clamped, together with the actuator stack, between an actuator cap and an actuator base. An elastic compound fills gaps between the drive housing and the spring element as well as between the spring element and the actuator casing, and damps an actuator motion. A piezoelectric actuator for the servo drive and a method of producing the piezoelectric actuator are also provided.


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