The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2001
Filed:
Nov. 23, 1999
Wataru Nogimori, Aichi-ken, JP;
Yoshihiro Naruse, Aichi-ken, JP;
Kouichi Irisa, Tokyo, JP;
Shinji Ando, Chiba-ken, JP;
Aisin Seiki Kabushiki Kaisha, Aichi-Ken, JP;
Abstract
A micromachined pump apparatus,includes a substrate,having upper and lower surfaces and a plurality of lengthwise arranged apertures,A-,E, each of which has an upper surface opening and a lower surface opening. A plurality of diaphragms,A-,E close the upper surface openings of the apertures,A-,E, respectively. A guide plate,is fixedly mounted on the upper surface of the substrate,and defines a passage,through which an object fluid is moved by cooperating with the diaphragms on the upper surface of the substrate,. A base plate,is fixedly mounted at its upper surface on the lower surface of the substrate,, thereby enclosing an operating fluid in each of the apertures,A-,E. An electrically operated heater device,is provided on the upper surface of the base plate,for heating the fluids in the apertures,A-,E, respectively, in such a manner that whenever the fluids are heated the resultant expansion of the respective operating fluid expands the diaphragms, respectively, toward the passage. The expansions of the diaphragms,A-,E are made in sequence, thereby forcing the object fluid to move through the passage