The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2001
Filed:
Oct. 20, 1999
Andrew A. Amatruda, Attleboro, MA (US);
Karl R. Abrahamson, Providence, RI (US);
Steven Beringhause, Norton, MA (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A capacitive fluid pressure sensor (,) particularly adapted for use with fluids which are incompatible with conventional elastomeric fluid seals is shown in which a thin, relatively flexible metal diaphragm (,) is disposed over a fluid pressure receiving recess (16,, 16,) formed in a bottom wall of a hexport housing (,) and hermetically attached thereto. A capacitive sensor element (,) having a pressure sensitive surface (,) is disposed in the housing with the pressure sensitive surface placed against the metal diaphragm with a plastic intermediate layer (,) disposed between the metal diaphragm and the sensor element to minimize hysteresis and output error. The metal diaphragm and plastic layers are shown to be flat members in certain embodiments (,and,) and corrugated in another embodiment (,).