The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2001
Filed:
Jan. 19, 1999
Armand P. Neukermans, Palo Alto, CA (US);
Timothy G. Slater, San Francisco, CA (US);
XROS, Inc., Santa Clara, CA (US);
Abstract
A topographic head for profilometry and AFM supports a central paddle by coaxial torsion bars projecting inward from an outer frame. A tip projects from the paddle distal from the bars. The topographic head's frame, bars and paddle are monolithically fabricated by micromachining from a semiconductor wafer. The torsion bars preferably include an integrated paddle rotation sensor. The topographic head may be carried on an XYZ stage for X, Y and Z axis translation. In a preferred embodiment, the XYZ stage is also monolithically fabricated by micromachining from a semiconductor wafer with a fixed outer base that is coupled to an X-axis stage via a plurality of flexures, and with the X-axis stage supporting a Y-axis stage also via a plurality of flexures.