The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2001
Filed:
Aug. 10, 1999
Applicant:
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; H01L 2/1306 ;
U.S. Cl.
CPC ...
H01L 2/100 ; H01L 2/1306 ;
Abstract
The process for the direct preparation of cleaning solutions for semiconductor manufacture comprises producing the cleaning solutions directly at the site of use by mixing a gas with high-purity water, with a static mixer system being used. At least one of the gases NH,, HCl, ozone or HF is added.