The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2001
Filed:
Jun. 07, 1995
Douglas N. Mashburn, Knoxville, TN (US);
UT, Battelle LLC, Oak Ridge, TN (US);
Abstract
An apparatus for forming thin films includes a deposition chamber having a window and having an environment maintained at a temperature and pressure selected for optimized deposition conditions. A target is supported within the deposition chamber, and a laser source projects a laser beam through the window onto the target with sufficient energy and duration to produce an ablation plume. A crystallization chamber is in communication with the deposition chamber through an opening and has an environment maintained at a temperature and pressure selected for optimized crystallization conditions. A substrate is movably supported within the crystallization chamber in front of the opening in alignment with the ablation plume. A seal or other suitable means segregates the environments of the deposition chamber and the crystallization chamber.