The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2001
Filed:
Aug. 10, 1999
Applicant:
Inventors:
Minehiro Tonosaki, Kanagawa, JP;
Mitsunori Ueda, Chiba, JP;
Masato Kobayashi, Kanagawa, JP;
Hiroyuki Okita, Kanagawa, JP;
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08J 2/54 ; C23C 1/448 ; C23C 1/430 ; B05D 3/14 ; B05D 3/06 ;
U.S. Cl.
CPC ...
C08J 2/54 ; C23C 1/448 ; C23C 1/430 ; B05D 3/14 ; B05D 3/06 ;
Abstract
When an insulator is irradiated with an electron beam, a pulse-shape voltage is applied to the insulator from a pulse power source. As a result, a charge-up state of the insulator can be prevented. If an object which must be subjected to surface modification is an insulator, the object can effectively be irradiated with the electron beam to perform the surface modification.