The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 31, 2001

Filed:

Oct. 19, 1999
Applicant:
Inventor:

Masaru Nagao, Ama-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 1/900 ;
U.S. Cl.
CPC ...
G01C 1/900 ;
Abstract

An oscillator,and main frames,-,and,-,, coupled to one another by beams,-,through,-,, float above the upper face of a substrate,. The main frames,-,and,-,are divided into a plurality of sections along a Y-axis. Drive electrode portions,1-,through,-,drive the main frames,-,and,-,and the oscillator,in the direction of an X-axis. Due to an angular rate around a Z-axis perpendicular to the X and Y axes, the oscillator,oscillates in the direction of the Y-axis. The oscillation in the direction of the Y-axis is measured using a high-frequency signal applied to detection electrode portions,-,through,-,, whereby the angular rate is detected. The main frame,-,is provided with drive electrode portions,-,and,-,, while the main frame,-,is provided with drive electrode portions,-,and,-,. Drive signals independent from one another are supplied to the drive electrode portions,-,through,-,, whereby the main frames,-,and,-,are caused to oscillate precisely in the direction of the X-axis.


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