The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2001
Filed:
Feb. 18, 1999
Applicant:
Inventor:
Katsuhiko Hayashi, Tokyo, JP;
Assignee:
TDK Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01G 4/005 ; H01G 4/30 ; H01G 4/20 ;
U.S. Cl.
CPC ...
H01G 4/005 ; H01G 4/30 ; H01G 4/20 ;
Abstract
There is provided a capacitor employed in a MMIC and having a structure which is capable of increasing a capacitance of occupied areas of capacitor patterns and also reducing variation of a capacitance value in mass production. A substantial comb-type lower electrode,is formed on a substrate,, then a dielectric layer,is formed on the lower electrode,, and then a substantial comb-type upper electrode,is formed on the dielectric layer,. Respective element electrodes,(,) of one of the lower electrode,and the upper electrode,are arranged in blank areas between respective element electrodes,(,) of the other of the lower electrode,and the upper electrode