The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2001
Filed:
May. 25, 1999
Kenichiro Suzuki, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A microactuator with a platform mounted to a movable part of the microactuator, where at least a part of the platform includes at least a dielectric material so that the platform has a smaller dielectric constant than metals. More particularly, the microactuator includes a semiconductor substrate, a stator fixed to the semiconductor substrate where the stator has a stator electrode, a movable part floated from the stator and the semiconductor substrate where the movable part has a movable electode, a plurality of contacts which are in contact with parts of the platform and the movable electrode, and a platform on the contacts so that the platform is fixed to the movabled electrode through the contacts. At least a part of the platform includes a dielectric material to reduce an interaction of the platform with the electrodes when the electrodes are interacting with each other to move the movable part.