The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2001
Filed:
Aug. 25, 1999
John M. McIntosh, Orlando, FL (US);
Erik C. Houge, Orlando, FL (US);
Brittin C. Kane, Clermont, FL (US);
Simon J. Molloy, Orlando, FL (US);
Catherine Vartuli, Orlando, FL (US);
Lucent Technologies, Inc., Murray Hill, NJ (US);
Abstract
A non-destructive method for evaluating a topographical feature,of an integrated circuit,, such as a photoresist runner, includes core sectioning the feature to remove a small section,, without damage to the remainder of the wafer,on which the integrated circuit is formed. A tool having fine adjustment, such as a micromanipulator with a rod-shaped probe,in the form of a glass needle, is used to remove the section for examination and metrology. The section is separated from the underlying substrate surface,and can be examined from all sides. Variations in a critical dimension, such as line width W, along the length L of the section, as well as average measurements of the dimension, can be obtained.