The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2001
Filed:
Jul. 20, 1999
Applicant:
Inventors:
David Anton Klueppel, Broadview Heights, OH (US);
Voya R. Markovich, Endwell, NY (US);
Thomas Richard Miller, Endwell, NY (US);
Timothy L. Wells, Apalachin, NY (US);
William Earl Wilson, Waverly, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/912 ;
U.S. Cl.
CPC ...
H01L 2/912 ;
Abstract
A circuitized semiconductor structure comprising a layer of dielectric material, a catalyst seed layer above the layer of dielectric material, a layer of photoimageable dielectric material on the catalyst seed layer and having openings therein, a nickel layer in the openings and a layer of copper in the openings above the nickel layer and being coplanar with the top of the layer of dielectric material is provided, along with a method for its fabrication.