The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2001
Filed:
Apr. 26, 2000
Yoshihiro Matsumoto, Tateyama, JP;
Nippon Steel Semiconductor Corporation, Chiba, JP;
Abstract
The present invention is to provide a method of remodeling an existing clean room building into a clean room which satisfies a new required specification. A working room (,) is expanded by removing a wall (,) between the working room (,) and a general passage (,). If a portion of the floor of the working room (,) is not the grated panel structure, such floor portion is formed as the grated panel structure by remodeling and the floor is formed as a perforated free access floor. The whole of the ceiling of the working room (,) is formed as a system ceiling of a frame structure from which a dust-collecting filter whose unit size is 600×1200 mm can be made freely detachable if necessary, and a ULPA filter is disposed on a portion which is requested to have a high cleanliness. An air-insulating panel of the same size may be attached to a portion which does not require the dust-collecting filter. An existing air conditioner that has been in use before remodeling is used as the air conditioner as it is.