The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2001
Filed:
Jun. 01, 1999
Peter Woias, München, DE;
Other;
Abstract
A micromechanically produced flow-restriction device has a first passage opening formed in a first main surface of a substrate. A channel is formed in a second main surface of the substrate and one end thereof is in fluid communication with the first passage opening. A second passage opening is in fluid communication with a second end of the channel. The first passage opening, the channel and the second passage opening define a flow path. A membrane is formed in the substrate and is in fluid communication with the first passage opening. A membrane electrode is formed at least on the membrane. A cover is attached to the second main surface of the substrate in such a way that the cover defines together with the channel a flow resistance of the flow-restriction device, the cover being provided with a counterelectrode which is arranged in opposed, spaced relationship with the membrane electrode in such a way that the membrane electrode and the counterelectrode define a capacitive pressure sensor, the capacitive pressure sensor being arranged on a wall of the flow path.