The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2001
Filed:
Apr. 13, 1999
Satoru Fujii, Takatsuki, JP;
Isaku Kanno, Yamatokohriyama, JP;
Takeshi Kamada, Nara, JP;
Ryoichi Takayama, Suita, JP;
Abstract
An acceleration sensor,comprises a longitudinal effect type detection unit,and a lateral effect type detection unit,The longitudinal effect type detection unit,comprises a longitudinal effect type piezoelectric element,comprising a piezoelectric body,of a thin film, an electrode,and an electrode,which is formed on a deposition substrate,serving also as a weight. The lateral effect type detection unit,is constituted by providing a lateral effect type piezoelectric element,comprising a piezoelectric body,of a thin film, an electrode,and an electrode,which is formed on the deposition substrate,and is cantilevered above a groovy recessed part,on a substrate,A detection circuit,detects an acceleration in a predetermined direction, based on an output of both the longitudinal effect type detection unit,and the lateral effect type detection unit,Consequently, it is possible to detect an acceleration in a predetermined direction and to make a wider dynamic range and a wider band.