The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
Oct. 13, 2000
Filplas Vacuum Technology PTE Ltd, Singapore, SG;
Abstract
Apparatus for feeding a target into a chamber of a cathode arc source comprises support structure (,) attached to or integral with the cathode arc source (,), a cathode station (,) for receiving a target (,) in electrical connection with an arc power supply, wherein the cathode station is mounted for movement (,) on the support structure relative to the chamber so as to feed the target into the chamber. The apparatus can also have a target cutter in the chamber for removing an upper portion of the target. A graphite target for feeding into the source is a composite of at least inner and outer sections, the inner section comprising graphite powder and having a density in the range 1.7-2.0 g/cm,and the outer section comprising graphite powder and having a density that is at least 0.1 g/cm,less than that of the inner section.