The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 17, 2001

Filed:

Aug. 23, 1999
Applicant:
Inventors:

Toshio Fukuda, Nagoya, JP;

Fumihito Arai, Nagoya, JP;

Koichi Itoigawa, Aichi, JP;

Hitoshi Iwata, Aichi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 4/104 ;
U.S. Cl.
CPC ...
H01L 4/104 ;
Abstract

A parallel plate structure (,) is provided with a pair of bimorph piezoelectric elements (,) and prismatic insulation spacers (,) inserted between the piezoelectric elements (,) at the upper and lower ends thereof for cementing the piezoelectric elements (,) together via the spacers (,). Each piezoelectric element (,) comprises a planar base material (,) of titanium, PZT thin films (,) formed on both sides of the base material (,) by the hydrothermal method, and electrode films (,) formed on the PZT thin films (,). The base material (,) is 20 &mgr;m thick and the PZT thin films (,) are several pm thick, while the aluminum electrode films (,) are several um thick.


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