The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
Apr. 10, 1998
Applicant:
Inventors:
Edward K. Pavelchek, Stow, MA (US);
Manuel DoCanto, Stoughton, MA (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/30 ; G03C 1/825 ;
U.S. Cl.
CPC ...
G03F 7/30 ; G03C 1/825 ;
Abstract
The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition, particularly for deep UV applications. The antireflective compositions of the invention comprise a photoacid generator that is activated during exposure of an overcoated photoresist. Antireflective compositions of the invention can significantly reduce undesired footing of an overcoated resist relief image.