The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
Mar. 18, 1997
Applicant:
Inventors:
Ryuji Biro, Kawasaki, JP;
Minoru Otani, Tokyo, JP;
Kenji Ando, Kawasaki, JP;
Yasuyuki Suzuki, Yokohama, JP;
Hidehiro Kanazawa, Tokyo, JP;
Assignee:
Canon Kabushika Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 9/00 ; B32B 1/706 ;
U.S. Cl.
CPC ...
B32B 9/00 ; B32B 1/706 ;
Abstract
A film formation method of forming at least one layered film on a substrate containing fluorite as a main ingredient by using a film formation apparatus which emits electrons or ions, which comprises the step of forming, as a first layered film counted from the side of the substrate, a film having a thickness of 30 nm or less and comprising at least one selected from the group consisting of SiO,, BeO, MgO, and MgF,.