The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 17, 2001

Filed:

Feb. 24, 2000
Applicant:
Inventors:
Assignee:

Patinor AS, Oslo, NO;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/434 ;
U.S. Cl.
CPC ...
C23C 1/434 ;
Abstract

A method of forming a diamond-like carbon coating in vacuum, comprising the steps of: pretreatment of the surface of the pad; placing the part into a vacuum chamber; treating the surface of the part with accelerated ions; applying a sublayer of a material onto the treated surface of the part; electric are vacuum sputtering a graphite cathode from a cathode spot and producing a carbon plasma accelerating an ion component of the carbon plasma; depositing the produced carbon plasma on the surface of the part and producing the diamond-like carbon coating. A pulsed electric are discharge is used, by which a plurality of cathode spots are excited at the end surface of the graphite cathode, cathode spots moving along the end surface of the cathode at a speed of from 10 to 30 m/s and generating a carbon plasma having an ion energy of 40 to 100 eV and an ion concentration in the plasma of 10,to 10,cm,, with electrically insulating the part in the vacuum chamber. The temperature of the part in the range of 200 to 450 K by controlling the repetition frequency of discharge pulses basis.


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