The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2001
Filed:
Aug. 06, 1998
William J. Fosnight, Austin, TX (US);
Joshua W. Shenk, Austin, TX (US);
Asyst Technologies, Inc., Fremont, CA (US);
Abstract
A system is disclosed for retaining a pod door on a port door at a load port, and for removing contaminants, particulates and/or gasses from between the pod and port door surfaces and from within the interior of the pod door. According to a preferred embodiment of the present invention, a vacuum source may be provided within, adjacent to, or remote from a process tool, which vacuum source is connected to a vacuum port in the front surface of a port door. The vacuum is provided to produce a negative pressure between juxtaposed surfaces of the port and pod doors. The negative pressure accomplishes two functions. First, the negative pressure serves to hold the pod door firmly against the port door to prevent vibration, tilting and/or movement of the pod door with respect to the port door while the pod and port doors are stowed within the process tool. Second, the negative pressure serves to remove particulates, contaminants and/or gasses from between the pod and port doors and from within the interior volume of the pod door.