The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2001
Filed:
Jul. 20, 1999
Dario Cini, Cornaredo, IT;
Benedetto Vigna, Potenza, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A microactuator comprises an outer stator and an inner rotor electrostatically coupled to a stator. The rotor comprises a suspended mass with a substantially circular shape, and a plurality of mobile arms extending radially towards the exterior, starting from the suspended mass. The stator has a plurality of pairs of fixed arms extending radially to the suspended mass, a respective mobile arm being arranged between each pair of fixed arms. The fixed arms are divided into fixed drive arms connected to a drive stage for actuating the microactuator, and into fixed measure arms connected to a measure stage, and define a capacitive uncoupling structure.