The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2001
Filed:
Jan. 21, 1997
Roland Mueller-Fiedler, Leonberg, DE;
Christoph Treutler, Wannweil, DE;
Michael Gundlach, Asperg, DE;
Manfred Moellendorf, Leonberg, DE;
Steffen Schmidt, Reutlingen, DE;
Franz Laermer, Stuttgart, DE;
Christoph Kampshoff, Reutlingen, DE;
Klaus Heyers, Reutlingen, DE;
Joerg Buth, Gerlingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
With a sensor and method, it is possible for platinum resistor elements to be used advantageously as heating elements, temperature sensors, printed circuit traces, or as chemically resistant electron beam sensitive layers. To ensure a long-lasting adhesion of the platinum resistance layer to a dielectric substrate, even during exposure to temperatures which are elevated over ambient temperature and under dry and most atmospheric conditions, a thin adhesion layer of platinum silicide, for example, is deposited between the platinum resistance layer and the dielectric substrate. Resistor elements patterned from the platinum layer can advantageously be used in temperature sensors, mass flow sensors, chemical sensors, gas sensors, or humidity sensors.