The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2001

Filed:

Dec. 02, 1999
Applicant:
Inventors:

Yoshihiko Shibata, Shizuoka, JP;

Naohiro Kuze, Shizuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/104 ;
U.S. Cl.
CPC ...
H01L 4/104 ;
Abstract

A surface acoustic wave element includes a LiNb,Ta,O,('x' is 0 or more and 1 or less) film on a (,) sapphire substrate, in which a Love wave is propagated as a surface acoustic wave in a specific direction of the LiNb,Ta,O,film. Preferably, a crystal axis of the sapphire substrate and a crystal axis of a (,) LiNb,Ta,O,film ('x' is 0 or more and 1 or less) are parallel to each other; a surface acoustic wave propagation direction is within a range of ±20 degrees around an axis vertical to a C-axis projection line direction of a crystal axis of the sapphire substrate or the (,) LiNb,Ta,O,film. Alternatively, a C-axis projection line direction of a crystal axis of the sapphire substrate and a C-axis direction of a crystal axis of a (,) LiNb,Ta,O,film (‘x’ is 0 or more and 1 or less) are parallel to each other, and the surface acoustic wave propagation direction is within a range of ±35 degrees around an axis vertical to a C-axis projection line direction of a crystal axis of the sapphire substrate. A piezoelectric substrate preferably has an intermediate layer including of a metal or a metal oxide between the sapphire substrate and the (,) LiNb,Ta,O,(‘x’ is 0 or more and 1 or less).


Find Patent Forward Citations

Loading…