The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2001
Filed:
Dec. 28, 1999
Jae Whan Kim, Kyoungki-do, KR;
Hyundai Eletronics Industries Co., Ltd., Kyoungki-do, KR;
Abstract
A method of manufacturing a CMOS device which can prevent latch-up and easily apply to high integration device by completely isolating a N well and a P well in the back side of a substrate, is disclosed. A method of manufacturing a CMOS device according to the present invention, includes the steps of: providing a semiconductor having a back side and a front side, and including a N well and a P well formed therein respectively, a NMOS transistor formed on the P well, a PMOS transistor formed on the N well; etching the back side of the substrate along the PN junction portions of the N well and the P well to the front side of the substrate, thereby forming trenches; and, forming an insulating layer on the back side of the substrate to fill the trenches, thereby isolating the P well and the N well. Furthermore, a method of manufacturing a CMOS device according to the present invention, further includes the steps of: etching the insulating layer to expose portions of the P well and N well, thereby forming contact holes; forming a metal layer on the insulating layer to fill the contact holes; and patterning the metal layer to form an interconnection line.