The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2001
Filed:
Oct. 27, 1999
Applicant:
Inventor:
Hiroaki Takeishi, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaishi, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; H02K 4/100 ;
U.S. Cl.
CPC ...
G03B 2/742 ; H02K 4/100 ;
Abstract
An exposure apparatus optically transfers a pattern drawn on an original plate onto an exposure target. When positioning a stage, which is movable with an exposure target or original plate being mounted thereon, the coordinate origin as the reference is switched, when necessary, to match the operating state of the apparatus. The stage is positioned with reference to coordinate information having this coordinate origin as the reference.