The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2001
Filed:
Oct. 13, 1998
Applicant:
Inventor:
Josephus J. M. Braat, Eindhoven, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 5/08 ;
U.S. Cl.
CPC ...
G02B 5/08 ;
Abstract
A mirror projection system for use in a step-and-scan lithographic projection apparatus, in which a mask pattern is repetitively scan-imaged on a number of areas of a substrate by means of a beam of EUV radiation, and having a cross-section shaped as a segment of a ring, has six imaging mirrors. The design is such that an intermediate image is formed between the fourth and the firth mirror from the object side, and the system has a relatively large working distance.