The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2001
Filed:
Jul. 01, 1999
Thomas Bert Gorczyca, Schenectady, NY (US);
Herbert Stanley Cole, Burnt Hills, NY (US);
Lockheed Martin Corp., Moorestown, NJ (US);
Abstract
A method for making an HDI-connected circuit is described, which in a simple manner allows an air pocket, space, gap, or bubble to be formed over pressure- or dielectric-sensitive portions of a semiconductor chip. The method applies a layer of uncured adhesive over a dielectric film, and also over any electrical conductors deposited on the film. The adhesive is exposed through a mask to a laser beam, which selectively vaporizes the adhesive in the exposed regions, to define the air pocket region. The semiconductor chips are applied, electrode-side down, on the adhesive, with the sensitive regions registered with the pockets. The adhesive is cured, and conductive vias are formed through the dielectric film and the adhesive to make contact with the electrodes of the semiconductor chips. Other layers of HDI interconnect are then applied over the dielectric film, and interconnected by vias, if needed. Either before or after the step of making the conductive vias, the bodies of the semiconductor chips are encapsulated.