The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2001
Filed:
Jul. 29, 1998
Agop H. Cherbettchian, Santa Monica, CA (US);
Martin Koran, Simi Valley, CA (US);
Lynette Ratkovic, Los Angeles, CA (US);
Alan F. Stewart, Thousand Oaks, CA (US);
Litton Systems, Inc., Woodland Hills, CA (US);
Abstract
A method and apparatus for depositing spatially substantially uniform layers of material onto a plurality of substrates positioned upon a rotatable tool within a vacuum chamber. The chamber is generally of the type that includes a sealable volume bounded by six orthogonally-arranged chamber walls. Apparatus is provided within the chamber for generating a flux of the coating material of known spatial character. A mask of predetermined shape is engaged to apparatus, including a linkage and a linear translation stage driven by a programmable stepper motor, for controllably advancing it during deposition with respect to the mounted substrate.