The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2001
Filed:
Mar. 14, 1995
Jürgen Lange, Vellmar, DE;
Norbert Gill, Vellmar, DE;
Other;
Abstract
In order to avoid short-circuits between the electrodes, the pressure sensor comprises: a substrate (,) made of ceramic material, on one surface of which an electrode (,) and a glass layer (,) formed from an original glass frit are disposed; a diaphragm (,) made of ceramic material, which is permanently joined and pressure-sealed to the substrate by means of the original glass frit acting as a spacer (,) holding the diaphragm and the substrate from each other to form a cavity (,), and which on the cavity side is provided with an electrode (,); and leads (,) which extend inwards and/or through the diaphragm (,) to the electrodes (,) in the region of the spacer (,). The differential pressure sensor is formed in a mirror-inverted arrangement in relation to the centre plane of the substrate, so that it carries two pressure sensors. These are pressure-linked by a hole (,) filled with oil and connecting the two cavities and leading through the substrate and outwards. In a further development, thin insulating layers (,′) made of the material of the ceramic of the substrate or of a high-temperature glass can be fixed on the glass layer(s), respectively.