The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2001
Filed:
Nov. 05, 1999
Applicant:
Inventors:
Kenth Nilsson, Åkersberga, SE;
Eva Nilsson, Åkersberga, SE;
Assignee:
Pacesetter AB, Järfälla, SE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/108 ;
U.S. Cl.
CPC ...
H01L 4/108 ;
Abstract
An accelerometer has a cantilevered beam supported at one end and having an opposite free end, with an inertial, sensing mass mounted at the free end of the beam. The beam is formed of a piezoelectric layer and a supporting layer. The ratio of the thickness of the piezoelectric layer relative to the thickness of the supporting layer is in a range between 2 and 4. The ratio of the modulus of elasticity of the material forming the supporting layer relative to the modulus of elasticity of the material forming the piezoelectric layer is in a range between 8 and 12.