The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2001
Filed:
Feb. 11, 2000
Shigeru Odake, Tokyo, JP;
Naoki Matsumoto, Tokyo, JP;
Shinya Morita, Tokyo, JP;
Kouji Tometsuka, Tokyo, JP;
Kokusai Electric Co., Ltd., Tokyo, JP;
Abstract
The present invention is constituted so as to improve a quartz gas supply portion utilized in a normal pressure furnace, and to keep to a minimum the damage incurred by a normal pressure furnace by the shock from an earthquake. Quartz gas supply piping,for supplying a reactant gas is connected to a quartz reaction tube,, which constitutes a furnace body. A stress concentration portion,for concentrating stress by prioritizing another location when vibration occurs in a furnace body is formed on this gas supply piping,. The stress concentration portion,is disposed on the side of a source-side gas supply pipe,, which is in front of a pipe clamp,that connects the source-side gas supply pipe,to a reaction tube-side gas supply pipe,mounted to the reaction tube,. As a stress concentration portion,, the simplest of V-grooves can be formed in the circumferential direction.