The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2001
Filed:
May. 11, 1993
Applicant:
Inventors:
Joaquin Enrique Luna, Saginaw, MI (US);
Scott Allen Wheelock, Freeland, MI (US);
Assignee:
Hemlock Semiconductor Corporation, Hemlock, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 1/316 ;
U.S. Cl.
CPC ...
C30B 1/316 ;
Abstract
The present invention is an improved susceptor for a float-zone apparatus for the float-zone processing of silicon elements. The susceptor is of a cylindrical design which allows the susceptor to be positioned around a free end of a silicon element to heat the free end of the silicon element to facilitate inductive coupling of the free end of the silicon element with an RF induction coil heater. In a preferred embodiment of the present invention, the susceptor is formed from tantalum.