The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 26, 2001

Filed:

Aug. 24, 1998
Applicant:
Inventors:

Timothy R. Collins, Cologne, MN (US);

Michael L. Henning, Redwood Falls, MN (US);

Assignee:

Sensor Measurement Technology, Redwood Falls, MN (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 2/300 ;
U.S. Cl.
CPC ...
G01F 2/300 ;
Abstract

Sensors for use in sensing the level and temperature of a corrosive medium contained in a container. The sensors have particular use in the semiconductor manufacturing industry, however the sensors also have applications in the biotech, pharmaceutical, plating, chemical, petroleum, etc. industries. The sensors comprise first and second elongate, conductive sensor members, each of which has a longitudinal axis and is dimensioned to extend into the medium. The first and second sensor members each include a core that is made from a non-metallic, electrically resistive material having a plurality of non-metallic conductive fibers embedded therein. Each core has opposite ends and the fibers are oriented parallel to the longitudinal axis of the first and second sensor members and extend continuously substantially between the ends of the cores. Media level can be sensed by comparing the capacitance of the sensor members, which changes as the level of the media changes. By interconnecting the ends of the cores with a conductive member, a sensor is formed that can be used to sense the temperature of the media.


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