The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2001
Filed:
Oct. 21, 1998
Applicant:
Inventor:
Junichi Azumi, Miyagi, JP;
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/68 ;
U.S. Cl.
CPC ...
G01F 1/68 ;
Abstract
A substrate is put in flow of fluid, on which substrate a depression is formed. A film is disposed on an opening plane of the depression. A pair of heating elements, through each of which an electric current flows, are formed on the film at an upstream side and a downstream side of the flow of the fluid. A constant temperature-distribution arrangement is made in which the temperature distribution in each heating element when the electric current flows therethrough is constant along a longitudinal direction perpendicular to a direction in which the fluid flows.