The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2001
Filed:
Nov. 18, 1999
Applicant:
Inventors:
David John Bishop, Summit, NJ (US);
Robert Albert Boie, Westfield, NJ (US);
Flavio Pardo, New Providence, NJ (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/16 ; G01L 1/18 ; H01L 4/1053 ; H01L 4/1113 ;
U.S. Cl.
CPC ...
G01L 1/16 ; G01L 1/18 ; H01L 4/1053 ; H01L 4/1113 ;
Abstract
A micro-machined transducer having a structure in which an acoustic enclosure is formed on a substrate above the plane of the substrate surface is disclosed. Forming the acoustic enclosure on the substrate above the plane of the substrate surface, rather than an acoustic cavity in a surface of the substrate, provides an acoustic cavity whose size is not limited by the thickness of the substrate.