The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 19, 2001

Filed:

Aug. 22, 1997
Applicant:
Inventors:

Charles Zimnicki, Bartlett, IL (US);

James F. Caruba, Bartlett, IL (US);

Piyush Chaudhari, Carpentersville, IL (US);

Theodore Lind, Lombard, IL (US);

Assignee:

CTs Corporation, Elkhart, IN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/108 ;
U.S. Cl.
CPC ...
H01L 4/108 ;
Abstract

A piezoelectric resonator (,) having a sacrificial mass-loading layer (,). Material is removed from the mass-loading layer (,) to raise a resonator frequency to a desired target. The sacrificial layer (,) is of a dense material, such as silver or gold, but is of such a relative thin layer that it can be used on high frequency aluminum electrodes (,) of a resonator (,) without increasing adverse spurious frequency problems. It is not necessary that the mass-loading layer (,) be conductive. In addition, the silver or gold sacrificial layer (,) can be removed by ion milling at practical and economical rates, unlike aluminum or aluminum oxide. Preferably, a diffusion barrier (,) is interposed between the electrodes (,) and the mass-loading layer (,).


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