The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2001
Filed:
Aug. 03, 1998
Hiroshi Muramatsu, Chiba, JP;
Eisuke Tomita, Chiba, JP;
Seiko Instruments Inc., , JP;
Abstract
A scanning probe microscope comprises a cantilever probe disposable proximate a surface of a sample and having a first resonance frequency. A three-dimensional fine movement element scans the cantilever probe and the surface of the sample relative to one another two-dimensionally. A sensor cantilever detects displacement of the cantilever probe during relative scanning movement between the cantilever probe and the surface of the sample. The sensor cantilever has a second resonance frequency different from the first resonance frequency and is disposed spaced apart but within touching distance from the cantilever probe so that displacement of the cantilever probe is transmitted to the sensor cantilever by contact between the sensor cantilever and the cantilever probe.1