The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2001
Filed:
Jan. 08, 1999
Applicant:
Inventor:
David L. Halbmaier, Shorewood, MN (US);
Assignee:
Fluoroware, Inc., Chaska, MN (US);
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/02 ; B08B 3/04 ; B08B 9/00 ; B08B 9/093 ;
U.S. Cl.
CPC ...
B08B 3/02 ; B08B 3/04 ; B08B 9/00 ; B08B 9/093 ;
Abstract
A method of cleaning a wafer carrier utilizes two isolated fluidic circuits. The wafer carrier having an interior and an exterior. The carrier is sealingly attached to a cleaning apparatus having separate isolated areas, one isolated area including the interior and the other the exterior. Fluid of the first fluidic circuit is sprayed on the interior and fluid from the second circuit is sprayed on the exterior reducing cross contamination.