The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2001
Filed:
Jan. 13, 1999
Applicant:
Inventors:
John J. Chapman, Ware Neck, VA (US);
Purnell Hopson, Jr., Seaford, VA (US);
Nancy M. Holloway, Hayes, VA (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/04 ;
U.S. Cl.
CPC ...
G01L 9/04 ;
Abstract
A miniature, multi-channel, electronically scanned pressure measuring device uses electrostatically bonded silicon dies in a multi-element array. These dies are bonded at specific sites on a glass, pre-patterned substrate. Thermal data is multiplexed and recorded on each individual pressure measuring diaphragm. The device functions in a cryogenic environment without the need of heaters to keep the sensor at constant temperatures.