The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2001
Filed:
Sep. 11, 1998
Shunsuke Sugimura, Hiratsuka, JP;
Matsuo Nose, Chigasaki, JP;
Komatsu Ltd., Tokyo, JP;
Abstract
A control device for a work carrying system characterized in that a first point where the moving action of a work transitions from a moving action from an origin process chamber to a transfer chamber to a moving action inside the transfer chamber and a second point where the moving action of the work transitions from the moving action inside the transfer chamber to a moving action from the transfer chamber to a destination process chamber are set on a moving path of the work, and that speed patterns on the moving path are set based on a transfer distance of the work and time required to open and close gate means of the origin and destination process chambers such that the opening of a gate valve at the destination is completed when the work reaches the second point on the moving path and that a transfer time from the first point to the second point becomes the shortest time which is longer than the opening and closing time of the gate valve, the speed of a work carrying robot being controlled in accordance with the set speed patterns, whereby any chance of the robot being temporarily stopped is minimized so as to effect high-speed carrying of a work such as a wafer requiring a shortest possible carrying time.