The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2001
Filed:
Mar. 09, 1999
Kazunari Nishihara, Sakai, JP;
Kiyotomo Kubota, Kadoma, JP;
Hirohumi Tajika, Osaka, JP;
Koji Nomura, Shijyonawate, JP;
Tetsuro Shimamura, Kyoto, JP;
Yukinori Sasaki, Nishinomiya, JP;
Masako Yamaguchi, Neyagawa, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
The present invention relates to a bimorph type piezoelectric acceleration sensor used in detecting vibrations of a variety of equipment such as a hard disk, CD-ROM and the like and has the objective of providing a bimorph type piezoelectric element for acceleration sensor of a small size, high sensitivity, a narrow range of sensitivity variation and a low cost by forming a freely vibrating part and a supporting means at the same time in single-piece construction through a grinding away process applied to lithium niobate. One section of a structure formed of two of a lithium niobate single-crystal plate directly bonded together with the polarization directions thereof reversed each other is applied with a grinding away process to produce a freely vibrating part (,) and the remaining section, where no grinding away process has been applied, serves as a supporting member (,), thus both being formed simultaneously and made integral with each other, and electrodes (,) are formed by electroless plating.