The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2001
Filed:
Jun. 05, 1998
Akitoshi Toda, Kunitachi, JP;
Shuzo Mishima, Hachioji, JP;
Olympus Optical Co., Ltd., Tokyo, JP;
Abstract
A probe chip suitable for observing the vertical walls of steps in a specimen includes a cantilever-like elastic member section extending from a support section, and a probe section at the free end of the elastic member section. The probe section is in the form of a triangular flat plate. Three ridges are terminated at two vertexes at the tip of the probe section. The direction normal to the plane of the probe section section is parallel to the ridge connecting the two points at the tip. These two terminal points at the tip of the probe section act as a virtual probe and interact with the surface of the specimen. The direction normal to the plane of the elastic member section is nonparallel to the direction normal to the plane of the probe section.