The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2001
Filed:
Jan. 13, 1998
Applicant:
Inventors:
Toshiyuki Sakemi, Niihama, JP;
Masaru Tanaka, Niihama, JP;
Assignee:
Sumitomo Heavy Industries, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/408 ;
U.S. Cl.
CPC ...
C23C 1/408 ;
Abstract
An auxiliary anode (,) having a ring-shaped permanent magnet (,) is placed in a vacuum chamber (,) such that the auxiliary anode is coaxial with a central axis of a hearth (,) and is positioned so as to surround an upper area of the hearth. A plasma beam generated by a plasma beam generator (,) using arc discharge is guided into the hearth. Magnesium (Mg) is used as a vaporization material on the hearth. Gas mixed with oxygen is supplied into the vacuum chamber. As a result, magnesium oxide particles sublimated from the hearth react with oxygen plasma generated by the plasma to form a magnesium oxide (MgO) film on a substrate (,).