The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2001
Filed:
Dec. 02, 1999
Applicant:
Inventors:
Matthew Peter Szapucki, Toms River, NJ (US);
Richard Kulkaski, Forked River, NJ (US);
Trevor J. Hadley, Brick, NJ (US);
Mark Anthony Santorelli, Barnegat, NJ (US);
Assignee:
M.E.C. Technology, Inc., Toms River, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 1/506 ; B65G 4/907 ;
U.S. Cl.
CPC ...
B25J 1/506 ; B65G 4/907 ;
Abstract
A wafer transfer arm made from a machineable material for picking up and delivering a semiconductor wafer from one location to another, includes a blade body with a longitudinal channel extending along one surface, and a coverplate adapted to matingly fit into the channel for defining a vacuum conduit therein. The vacuum conduit provides fluid communication between an inlet at one end of the blade body and an outlet at the other end, for suctionally retaining the semiconductor wafer by vacuum pressure or suction.